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MEMS : Biosensors and Nanosensors

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Published Date: Feb, 2011
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No of Pages: 197
 
 
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  • Abstract
  • Table of Contents

BCC estimates the global market for microsensors at nearly $5.2 billion in 2010, increasing to nearly $5.9 billion in 2011 and $12 billion in 2016, a compound annual growth rate (CAGR) of 15.3% between 2011 and 2016.

MEMS sensors account for the bulk of the microsensor market. This sector is projected to be worth nearly $3.2 billion in 2011 and is expected to increase at a 15.5% compound annual growth rate (CAGR) to reach $6.5 billion in 2016.

Nanosensors share should increase from 0.1% of the market to 0.3%. While this is the smallest market share, this sector represents the greatest growth rate. This market is projected to be worth $6.5 million in 2011 and $38 million in 2016, a 42.7% compound annual growth rate (CAGR).

Additional Information

INTRODUCTION

STUDY BACKGROUND

This report is an update of an earlier BCC Research report published in 2008. MEMS, biochips, and nano-sensors (referred to collectively in this report as microsensors) make up one of the fastest-growing technology areas, with sales of nearly $5.2 billion in 2010 and expected to grow at a compound annual growth rate (CAGR) of 15.5% between 2011 and 2016.

Microsensors have proven to be a key enabling technology of developments in sectors such as transportation, telecommunications, and healthcare, but the range of microsensors applications covers nearly every sector. The most significant advantage of microsensors is their ability to communicate easily with semiconductor chips. Other advantages include microsensors compact size, reduced power consumption, lower cost, and increased reliability. The growth in the use of microsensors has also led to the creation of supporting industries in areas such as design software, design services, specialty fabrication equipment, and fabrication facilities.

BCC has surveyed individual segments of the microsensor industry previously; for example, in its recent (2010) studies of the global market for microelectromechanical systems or MEMS, automotive sensors, medical device sensors, and environmental sensors. BCC initiated the present study to bring together these related markets as well as update the findings and conclusions of the earlier reports.

The range of microsensor products and applications has grown rapidly in the past few years, but it is important to avoid hyping their prospects. Although some types of microsensors (airbag accelerometers, for example) have had great commercial success, other types (such as most types of nanosensors) have enjoyed less success. Still other technologies are still at the discovery and developmental stages, and their eventual commercialization will require the commitment of substantial resources, with long payback periods and substantial financial risk.

To the extent that hype results in exaggerated investor expectation, it can divert investment from microsensor technologies that have real commercial potential. In the worst case, disappointed expectations can lead to a drying-up of investment funds, similar to the one that occurred in the dot-com sector after 2000. This report takes a hard look at the market for microsensors and tries to provide a road map to the technologies and applications that are likely to enjoy the greatest commercial success in the years through 2016.

GOALS AND OBJECTIVES

The goal of this report is to provide investors and others with information on the commercial potential of various microsensor technologies and applications to assist them in making the key business decisions that lie ahead. Specific objectives include identifying segments of the microsensor market with the greatest commercial potential in the near to mid-term (2011 to 2016), projecting future demand in these segments, and evaluating the challenges that must be overcome for each segment to realize its potential.

INTENDED AUDIENCE

While it contains descriptions of microsensor technologies, this report is intended especially for microsensor marketing executives and other executives charged with asset allocation and corporate strategy, as well as entrepreneurs, investors, venture capitalists, and other readers with a need to know where the market for microsensors is headed in the next 5 years. The report is written primarily for lay readers rather than technologists, but it should also be useful to readers in the research and development community who seek to anticipate future flows in R&D funding. Officials of related government programs such as the U.S. National Nanotechnology Initiative should also find the report interesting.

SCOPE OF REPORT

The report addresses the global market for microsensors, including the following:

  • MEMS: Sensing devices that integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate, and typically have dimensions in the 1-micron to 100-micron range (1 micron = 1 millionth of a meter).

  • Biochips: Silicon chip-based detection devices that integrate a living organism or product derived from living systems (e.g., an enzyme or an antibody) and a transducer to provide an indication, signal, or other form of recognition of the presence of a specific substance in the environment. (Biological detection devices that do not generate an analytical signal, such as pregnancy tests or conventional glucose test strips, do not meet this reports definition of sensors.)

  • Nanosensors: Sensors that are nanoscale or incorporate nano-engineered structures such as nanotubes.

The study format includes the following major elements:

  • Executive summary
  • Definitions
  • Milestones in the development of microsensors
  • Current and developmental microsensor technologies and applications
  • Microsensor technologies and applications with the greatest commercial potential through 2016
  • Global microsensor market trends, 2010-2016
  • Microsensor market shares and industry structure

METHODOLOGY AND INFORMATION SOURCES

The methodologies and assumptions used to develop the market projections in this report are discussed at length in the detailed market estimates and projections for each microsensor technology. The report carefully documents data sources and assumptions. This way, readers can see how the market estimates were developed and, if they so desire, test the impact on the final numbers of changing assumptions such as price.

This section makes some general observations concerning the reports approach to estimating the market for developmental technologies whose commercial potential has not been demonstrated, which is always a challenging task. BCC used a multi-phase approach to identify the microsensor technologies with the greatest commercial potential and quantify the market for these applications, as described below.

In the first phase of the analysis, BCC identified a long list of potential microsensor technologies (including technologies that are still under development) and mapped them against potential applications and end-user industries, such as information technology/electronics, biotechnology, and healthcare.

In the second phase, BCC eliminated those microsensor technologies that appear to have little likelihood of making it into commercial production in the next 5 years, through a literature review and statements by industry sources. The result of phase two was a short list of technologies and applications with the greatest near to mid-term commercial potential.

The third phase focused on quantifying the potential market for each short-listed microsensor technology and identifying the main prerequisites for commercial success.

The base year for analysis and projection is 2010. At the time this report was prepared in early 2011, full-year 2010 data were not yet available for all market segments. In such cases, BCC estimated the market for 2010 based on historical trends and other available data.

With 2010 data (actual or estimated) as a baseline, market projections were developed for 2011 to 2016. These projections are based on a combination of a consensus among the primary contacts combined with BCCs understanding of the key market drivers and their impact from a historical and analytical perspective.


CHAPTER ONE: INTRODUCTION
STUDY BACKGROUND
GOALS AND OBJECTIVES
INTENDED AUDIENCE
SCOPE OF REPORT
METHODOLOGY AND INFORMATION SOURCES
ANALYST CREDENTIALS
RELATED BCC RESEARCH
BCC ONLINE SERVICES
DISCLAIMER

CHAPTER TWO: EXECUTIVE SUMMARY

SUMMARY TABLE GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2016 ($ MILLIONS)
SUMMARY FIGURE GLOBAL MICROSENSOR MARKET PROJECTIONS, 2010-2016 ($ MILLIONS)

CHAPTER THREE: MICROSENSORS OVERVIEW

GENERAL DESCRIPTION
DEFINITIONS
Sensors
Microsensors
MEMS
Biochips
Nanosensors
HISTORICAL PERSPECTIVE
MICROSENSOR TECHNOLOGIES AND APPLICATIONS

TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS

ACCELEROMETERS
GYROSCOPES
PRESSURE MICROSENSORS
CHEMICAL AND GAS MICROSENSORS
THERMAL MICROSENSORS
BIOCHIPS
NANO-CHEMICAL SENSORS
NANO-BIOSENSORS
NANO-RADIATION SENSORS
NANO-THERMAL SENSORS
MICROSENSOR MARKETS

TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2016 ($ MILLIONS)
FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, 2010-2016 ($ MILLIONS)
TABLE 3 PROJECTED RANKING OF THE LARGEST SELLING TYPES OF MICROSENSORS, 2010 VS. 2016
TABLE 4 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE, THROUGH 2016 ($ MILLIONS)
FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR MARKET BY END-USER SEGMENT, 2010-2016 (PERCENT OF TOTAL SALES)

CHAPTER FOUR: ENABLING TECHNOLOGIES FOR MICROSENSORS

MATERIALS TECHNOLOGIES

FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS TECHNOLOGIES BY TYPE, 2010 AND 2016 (PERCENT OF TOTAL MEMS SHIPMENTS)

SILICON
POLYMERS
METALS
NANOMATERIALS
Nanoparticles
Carbon Nanotubes
Graphene
Nanoribbons
Nanowires
Nanoceramics
Other Nanostructured Materials
MANUFACTURING TECHNOLOGIES
MICROMACHINING
Surface Micromachining

FIGURE 4 SACRIFICIAL LAYER ETCHING

Bulk Micromachining
LIGA

FIGURE 5 LIGA PROCESS DIAGRAM

Wafer Bonding
Anodic Bonding
Intermediate-Layer Assisted Bonding
Direct Bonding
Flip-Chip Bonding
ETCHING
Wet Anisotropic Etching

FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING

Dry Etching
Reactive Ion Etching
Deep Reactive Ion Etching
LASER MICROFABRICATION
Laser Micromachining
Laser-Assisted Chemical Etching
Laser Assisted Deposition
Stereolithography
Laser Surface Modification
Laser-Assisted Manipulation and Assembly
Laser Microbending
Physical Manipulation of Parts
Laser Joining
NANOPATTERNING
Nanoimprint Lithography
Hot Embossing Lithography
Ultraviolet Nanoimprint Lithography
Microcontact Printing
Dip Pen Nanolithography
Dip Pen Nanolithography (Continued)
Laser-Based Particle Deposition
Other Technologies
Powderblasting
Micromolding

CHAPTER FIVE: ACCELEROMETERS

TECHNOLOGIES
OPERATING MECHANISM

TABLE 5 MAJOR MEMS ACCELEROMETER TECHNOLOGIES

Capacitive
Electromagnetic
Piezoelectric
Piezoresistive
Optical
Tunneling
Thermal
AXES OF MEASUREMENT
LOW-G ACCELEROMETERS
APPLICATIONS

TABLE 6 COMMERCIAL ACCELEROMETER APPLICATIONS

AUTOMOTIVE APPLICATIONS
Airbag Actuation
Stability Systems
Vehicle Navigation
LIFE SCIENCES
Rate-Responsive Heart Pacemakers
Actigraphs
ENERGY
Oil and Gas Exploration
MILITARY/AEROSPACE
INFORMATION TECHNOLOGY
Hard Disk Drop Protection
CONSUMER PRODUCTS
“Smart” Sporting Goods
Personal Electronics
MISCELLANEOUS APPLICATIONS
ACCELEROMETER MARKET
SUMMARY

TABLE 7 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS, THROUGH 2016 ($ MILLIONS)
FIGURE 7 GLOBAL MEMS ACCLEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (PERCENT OF TOTAL SHIPMENTS)

AUTOMOTIVE APPLICATIONS

TABLE 8 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER APPLICATIONS, THROUGH 2016 ($ MILLIONS)

Airbag Sensors

TABLE 9 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2016 (MILLION UNITS)
FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES, 2010-2016 (MILLION UNITS)
TABLE 10 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Vehicle Stability Control Systems

TABLE 11 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2016 (MILLION VEHICLES)
FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEMS, 2010-2016 (MILLION VEHICLES)
TABLE 12 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Navigation Systems

TABLE 13 PROJECTED GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS WITH INTEGRATED INS, THROUGH 2016 (MILLION VEHICLES)
FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS, 2010-2016 (MILLION SYSTEMS SHIPPED)
TABLE 14 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

LIFE SCIENCES APPLICATIONS

TABLE 15 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2016 ($ MILLIONS)

Rate-Responsive Heart Pacemakers

TABLE 16 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH 2016 (THOUSANDS OF PACEMAKERS)
FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS, 2010-2016 (THOUSAND UNITS)
TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE RESPONSIVE HEART PACEMAKERS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

Activity Monitoring Systems

TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN ACTIGRAPHS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

ENERGY

Seismic Detection Systems

TABLE 19 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

MILITARY/AEROSPACE

TABLE 20 PROJECTED GLOBAL SALES OF GPS SYSTEMS FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2016 ($ MILLIONS)
FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR GPS SYSTEMS, 2010-2016 ($ MILLIONS)
TABLE 21 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

INFORMATION TECHNOLOGY

TABLE 22 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2016 ($ MILLIONS)

Hard Disk Drive Drop Protection

TABLE 23 GLOBAL MARKET PROJECTIONS FOR HARD DRIVEEQUIPPED LAPTOP COMPUTERS, THROUGH 2016 (MILLION UNITS)
FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVE-EQUIPPED LAPTOP COMPUTERS, 2010-2016 (MILLION DEVICES)
TABLE 24 GLOBAL MARKET PROJECTIONS FOR LAPTOP COMPUTER HARD DRIVE DISK PROTECTION APPLICATIONS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Hard Disk Read/Write Head Tracking Mechanism

TABLE 25 GLOBAL MARKET FOR MEMS ACCLEROMETERS IN HARD DISK READ/WRITE HEAD TRACKING SYSTEMS, 2010-2016 (MILLION UNITS/MILLION $)

CONSUMER PRODUCTS

TABLE 26 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2016 ($ MILLIONS)

Mobile Phone User Interface

TABLE 27 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS, THROUGH 2016 (MILLIONS OF HANDSETS)
FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS, 2010-2016 (MILLIONS OF HANDSETS)
TABLE 28 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Electronic Gaming User Interface

TABLE 29 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Digital Camera Image-stabilization Systems

TABLE 30 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2016 (MILLION CAMERAS)
FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, 2010-2016 (MILLION UNITS)
TABLE 31 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
“Smart” Sporting Goods
TABLE 32 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN “SMART” SPORTING GOODS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

OTHER APPLICATIONS

TABLE 33 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN OTHER NON-MILITARY APPLICATIONS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

CHAPTER SIX: GYROSCOPES

TECHNOLOGIES

TABLE 34 MAJOR MEMS GYROSCOPE TECHNOLOGIES

TUNING FORK GYROSCOPE
WINE GLASS RESONATOR GYROSCOPES
RING RESONATOR GYROSCOPES
VIBRATING WHEEL
SPINNING WHEEL GYROSCOPE
MICRO-OPTICAL-ELECTROMECHANICAL SYSTEMS (MOEMS) GYROS
Interferometric MOEMS Gyroscope
APPLICATIONS

TABLE 35 GYROSCOPIC MEMS APPLICATIONS

AUTOMOTIVE
Vehicle Stabilization Systems
Rollover Detection
Vehicle Navigation Systems
LIFE SCIENCES
CONSUMER PRODUCTS
Digital Camera Image-stabilization Systems
Personal Transportation Devices
Robotic Toys
Household Robots
MILITARY/AEROSPACE
OTHER APPLICATIONS
Mobile Industrial/Service Robots
GYROSCOPE MARKET
SUMMARY

TABLE 36 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES, THROUGH 2016 ($ MILLIONS)
FIGURE 16 GLOBAL MEMS ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (% OF TOTAL SHIPMENTS)

AUTOMOTIVE

TABLE 37 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN AUTOMOTIVE APPLICATIONS, THROUGH 2016 ($ MILLIONS)

Stability Control

TABLE 38 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Rollover Detection

FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, 2010-2016 (MILLION UNITS)
TABLE 39 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSOCPES USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Navigation Systems

TABLE 40 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

CONSUMER PRODUCTS

TABLE 41 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN CONSUMER PRODUCTS, THROUGH 2016 ($ MILLIONS)

Digital Camera Image-stabilization Systems

TABLE 42 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Personal Transportation Devices

FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS, 2010-2016 (UNITS)
TABLE 43 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN SEGWAY HUMAN TRANSPORTERS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

MILITARY/AEROSPACE

TABLE 44 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

OTHER APPPLICATIONS

Mobile Industrial/Service Robots

FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, 2019-2016 UNITS)
TABLE 45 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2016 (UNITS/$ MILLIONS)

CHAPTER SEVEN: PRESSURE SENSORS

TECHNOLOGY
APPLICATIONS

TABLE 46 ESTABLISHED PRESSURE SENSING MEMS APPLICATIONS, 2010

AUTOMOTIVE APPLICATIONS
Manifold Absolute Pressure (Map) Sensors
Tire Pressure Sensors
LIFE SCIENCES APPLICATIONS
Blood Pressure Monitors
CONSUMER PRODUCTS
Appliance Pressure Sensors
OTHER APPLICATIONS
PRESSURE SENSOR MARKET
SUMMARY

TABLE 47 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2016 ($ MILLIONS)
FIGURE 20 PROJECTED GLOBAL MEMS PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, 2010-2016 (PERCENT OF TOTAL SHIPMENTS)

AUTOMOTIVE

TABLE 48 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2016 ($ MILLIONS)

Manifold Absolute Pressure Sensors

TABLE 49 GLOBAL MARKET PROJECTIONS FOR MEMS MANIFOLD ABSOLUTE PRESSURE SENSORS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

Tire Pressure Sensors

TABLE 50 GLOBAL MARKET PROJECTIONS FOR MEMS TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

LIFE SCIENCES
Blood Pressure Monitors

TABLE 51 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD PRESSURE SENSORS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

CONSUMER PRODUCTS
Appliance Pressure Sensors


TABLE 52 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSORS IN HOME APPIANCES, THROUGH 2016 (MILLION UNITS/$ MILLIONS)

CHAPTER EIGHT: CHEMICAL AND GAS SENSORS

TECHNOLOGIES
ELECTROCHEMICAL SENSORS
MASS SENSORS
Optical Sensors
APPLICATIONS

TABLE 53 MEMS CHEMICAL AND GAS SENSOR APPLICATIONS

AUTOMOTIVE
Exhaust and Cabin Air Quality Sensors
LIFE SCIENCES
Blood Gas Monitors
ENVIRONMENTAL PROTECTION
Portable/Personal Air Quality Detectors
MILITARY/PUBLIC SAFETY
Chemical Agent Detectors
OTHER APPLICATIONS
Industrial Leak Detection and Process Control
MARKETS

TABLE 54 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2016 ($ MILLIONS)

FIGURE 21 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 ((PERCENT OF TOTAL SHIPMENTS)


AUTOMOTIVE

TABLE 55 GLOBAL MARKET PROJECTIONS FOR MEMS GAS SENSORS USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2016 ($ MILLIONS)

Exhaust Gas and Cabin Air Quality Sensors

TABLE 56 PROJECTED NUMBER OF CATALYTIC CONVERTEREQUIPPED VEHICLES PRODUCED WORLDWIDE, THROUGH 2016 (MILLION UNITS)

FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, 2010-2016 (MILLION VEHICLES)

LIFE SCIENCES

Blood Gas Monitors

TABLE 57 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2016 (UNITS)

FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS, 2010-2016 (UNITS)

TABLE 58 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD GAS SENSORS, THROUGH 2016 (UNITS/$ MILLIONS)

ENVIRONMENTAL PROTECTION

Air Quality Monitoring

TABLE 59 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH 2016 ($ BILLIONS)

FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING EQUIPMENT MARKET TRENDS, 2010-2015 ($ BILLIONS)

TABLE 60 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS, THROUGH 2016 (UNITS/$ MILLIONS)

MILITARY/PUBLIC SAFETY

Chemical Agent Detectors

TABLE 61 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE CW AGENT DETECTORS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

PROCESS INDUSTRIES
Industrial Process Control and Leak Detection

TABLE 62 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF MEMS INDUSTRIAL CHEMICAL AND GAS SENSORS, THROUGH 2016 ($ MILLIONS)

CHAPTER NINE: THERMAL SENSORS

TECHNOLOGIES
THERMOCOUPLES
THERMORESISTORS
MICROBOLOMETERS
MICROCANTILEVERS
OTHER TECHNOLOGIES
APPLICATIONS
AUTOMOTIVE
MILITARY/PUBLIC SAFETY
OTHER
MARKETS

TABLE 63 GLOBAL MARKET PROJECTIONS FOR OPTICAL MEMS IN INFRARED SENSORS BY APPLICATION SEGMENT, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
FIGURE 25 GLOBAL MEMS IR SENSOR MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (% OF TOTAL SHIPMENTS)

MILITARY/PUBLIC SAFETY

TABLE 64 GLOBAL MILITARY/PUBLIC SAFETY MARKET FOR INFRARED MEMS SENSORS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

AUTOMOTIVE

Night Vision Systems

TABLE 65 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED MEMS SENSORS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)

OTHER APPLICATIONS

TABLE 66 GLOBAL MARKET FOR INFRARED MEMS SENSORS IN OTHER APPLICATIONS, THROUGH 2016 ($ MILLIONS)

CHAPTER TEN: BIOCHIPS

TECHNOLOGIES
SAMPLE MANIPULATION TECHNOLOGIES
Microchannels
Micropumps
Mechanical Micropumps
Piezoelectric Pumps
Pneumatic Pumps
Thermopneumatic Pumps
Electrostatic Pumps
Non-Mechanical Pumps
Capillary Pumps
Electrohydrodynamic Pumps
Electrokinetic Pumps
Magneto-Hydrodynamic Pumps
Phase Difference Pumps
Micronozzles
Microvalves
Passive Microvalves
Active Microvalves
Micromixers
Active Mixers
SAW Mixers
Magneto-Hydrodynamic Mixers
Passive Mixers
Microreactors
SENSING MEDIATOR
Enzyme Biochips
Affinity Biochips
TRANSDUCER
APPLICATIONS

TABLE 67 BIOCHIP APPLICATIONS

LIFE SCIENCES
MILITARY/PUBLIC SAFETY
Chemical and Biological Agent Detectors
PROCESS INDUSTRIES
Food Quality Testing
MARKETS

TABLE 68 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2016 ($ MILLIONS)

FIGURE 26 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (% OF TOTAL SHIPMENTS)

LIFE SCIENCES

TABLE 69 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY APPLICATION, THROUGH 2016 ($ MILLIONS)

Life Sciences Research

TABLE 70 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2016 ($ MILLIONS)

Diagnostic Biochips

TABLE 71 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LOC DIAGNOSTIC DEVICES, THROUGH 2016 ($ MILLIONS)

MILITARY/PUBLIC SAFETY

TABLE 72 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC BIOCHIPS USED IN CBW SENSORS, THROUGH 2016 ($ MILLIONS)

PROCESS INDUSTRIES

Food Testing

TABLE 73 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN FOOD TESTING APPLICATIONS, THROUGH 2016 ($ MILLIONS)

CHAPTER ELEVEN: NANO-CHEMICAL SENSORS

TECHNOLOGIES

TABLE 74 NANO-CHEMICAL SENSOR TECHNOLOGIES

NANOTUBES
Carbon Nanotubes
Other Types of Nanotubes
NANORIBBONS
NANOWIRES
NANO-CANTILEVERS
NANO-PARTICLES
NANOCERAMICS
APPLICATIONS

TABLE 75 NANO-CHEMICAL SENSOR APPLICATIONS

LIFE SCIENCES
Respiratory Monitoring
PROCESS INDUSTRIES
Leak Detection
MARKET

TABLE 76 GLOBAL SALES PROJECTIONS OF NANOCHEMICAL SENSORS BY APPLICATION SEGMENT, THROUGH 2016 ($ MILLIONS)

CHAPTER TWELVE: NANO-BIOSENSORS

TECHNOLOGIES

TABLE 77 NANO-BIOSENSOR TECHNOLOGIES

SILICON NANOWIRES
NANO-CANTILEVERS
FIBER OPTIC
NANOTUBES
NANOSTRUCTURED MEMBRANE
PHOSPHOLIPIDS
DNA-SENSITIZED GRAPHENE VAPOR SENSORS
NANOGAP SENSOR ARRAY
APPLICATIONS

TABLE 78 NANO-BIOSENSOR APPLICATIONS

LIFE SCIENCES
Molecular Diagnostics
Blood Analysis
MARKETS
LIFE SCIENCES

TABLE 79 PROJECTED GLOBAL SALES OF NANO-BIOSENSORS TO THE LIFE SCIENCES MARKET, THROUGH 2016 ($ MILLIONS)

Molecular Diagnostics

FIGURE 27 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTIC EQUIPMENT VS. CONSUMABLES, 2010 (%)
TABLE 80 GLOBAL MARKET PROJECTIONS FOR NANOBIOSENSOR POINT- OF-CARE MOLECULAR DIAGNOSTIC EQUIPMENT, THROUGH 2016 ($ MILLIONS)

Glucose Monitoring

CHAPTER THIRTEEN: NANO-RADIATION SENSORS

TECHNOLOGIES
NANOCANTILEVER SENSORS
GRAPHENE SENSORS
APPLICATIONS

TABLE 81 NANO-RADIATION SENSOR APPLICATIONS

MARKET

CHAPTER FOURTEEN: NANO-THERMAL SENSORS

TECHNOLOGIES
NANOPOWDER-BASED SENSORS
MARKETS
APPLICATIONS

TABLE 82 NANO-THERMAL SENSOR APPLICATIONS

CHAPTER FIFTEEN: INDUSTRY CHARACTERISTICS

NUMBER/SIZE OF FIRMS

FIGURE 28 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2009 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS)

MARKET SHARES

FIGURE 29 OVERALL GLOBAL MICROSENSOR MARKET SHARES BY COMPANY, 2009 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS)

APPENDIX I: COMPANY PROFILES

AFFYMETRIX, INC.
ANALOG DEVICES, INC.
ARCHANGEL SYSTEMS, INC.
ROBERT BOSCH GMBH
BOSTON MICROSYSTEMS, INC.
CALIPER LIFE SCIENCES
CEPHEID THERAPEUTICS
COLYBRYS SA
COMBIMATRIX CORP.
CONTINENTAL AG
CUSTOM SENSORS AND TECHNOLOGIES
DELPHI AUTOMOTIVE, LLP.
ENDEVCO CORP.
ENZO LIFE SCIENCES
EUROGENTEC
FEBIT AG
FLIR SYSTEMS, INC.
FREESCALE SEMICONDUCTOR, INC.
GE SENSING
GENETIX, LTD.
GMA INDUSTRIES, INC.
ICX PHOTONICS
INTEGRATED NANO-TECHNOLOGIES, LLC
I-STAT CORP.
KIONIX, INC.
KNOWLES ELECTRONICS
LOCKHEED MARTIN CORP.
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
M-BIOTECH, INC.
MEASUREMENT SPECIALTIES, INC.
MEMSIC, INC.
MICROCHEMICAL SYSTEMS SA
MOLECULAR NANOSYSTEMS, INC.
MURATA MANUFACTURING CO., LTD.
NANÔMIX, INC.
NIPPON DENSO CORP.
OMRON CORP.
ROCHE NIMBLEGEN, INC.
SENSONOR AS
SILICON DESIGNS, INC.
SILICON SENSING SYSTEMS
SONY CORP.
SPHERE MEDICAL, LTD.
STMICROELECTRONICS
SYNKERA TECHNOLOGIES, INC.
TOSHIBA CORP.
ULIS
VTI TECHNOLOGIES OY
XEOTRON CORP.
APPENDIX II: PATENT ANALYSIS
PATENTS BY TYPE OF MEMS

FIGURE 30 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR (PERCENT OF PATENTS ISSUED SINCE JANUARY , 2005)

MEMS PATENT ASSIGNEES
LARGEST PATENT HOLDERS

TABLE 83 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED BETWEEN 1/1/2005 AND 1/15/2011)

PATENT HOLDERS BY NATIONALITY

FIGURE 31 U.S. MICROSENSOR PATENTS BY NATIONALITY OF MICROSENSOR ASSIGNEE (PERCENT OF PATENTS ISSUED BETWEEN 1/1/2005 AND 1/15/2011)

LIST OF TABLES

SUMMARY TABLE GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2016 ($ MILLIONS)
TABLE 1 MAJOR MICROSENSOR TECHNOLOGIES AND APPLICATIONS
TABLE 2 GLOBAL MICROSENSOR MARKET PROJECTIONS, THROUGH 2016 ($ MILLIONS)
TABLE 3 PROJECTED RANKING OF THE LARGEST SELLING TYPES OF MICROSENSORS, 2010 VS. 2016
TABLE 4 GLOBAL MARKET PROJECTIONS FOR MICROSENSORS BY END USE, THROUGH 2016 ($ MILLIONS)
TABLE 5 MAJOR MEMS ACCELEROMETER TECHNOLOGIES
TABLE 6 COMMERCIAL ACCELEROMETER APPLICATIONS
TABLE 7 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS, THROUGH 2016 ($ MILLIONS)
TABLE 8 GLOBAL MARKET PROJECTIONS FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER APPLICATIONS, THROUGH 2016 ($ MILLIONS)
TABLE 9 PROJECTED GLOBAL SHIPMENTS OF AIRBAG MODULES, THROUGH 2016 (MILLION UNITS)
TABLE 10 GLOBAL MARKET PROJECTIONS FOR AIRBAG SENSORS IN MOTOR VEHICLES, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 11 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2016 (MILLION VEHICLES)
TABLE 12 GLOBAL MARKET FOR LOW-G ACCELEROMETERS USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 13 PROJECTED GLOBAL SHIPMENTS OF VEHICLE IN-DASH
NAVIGATION SYSTEMS WITH INTEGRATED INS, THROUGH 2016 (MILLION VEHICLES)
TABLE 14 GLOBAL MARKET PROJECTIONS FOR MEMS
ACCELEROMETERS USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 15 GLOBAL MARKET FOR ESTABLISHED ACCELEROMETER APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2016 ($ MILLIONS)
TABLE 16 GLOBAL SALES PROJECTIONS FOR CARDIAC PACEMAKERS, THROUGH 2016 (THOUSANDS OF PACEMAKERS)
TABLE 17 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS USED IN RATE RESPONSIVE HEART PACEMAKERS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 18 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS
USED IN ACTIGRAPHS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 19 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS
USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 20 PROJECTED GLOBAL SALES OF GPS SYSTEMS FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2016 ($ MILLIONS)
TABLE 21 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS
USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 22 GLOBAL MARKET PROJECTIONS FOR MEMS
ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2016 ($ MILLIONS)
TABLE 23 GLOBAL MARKET PROJECTIONS FOR HARD DRIVEEQUIPPED LAPTOP COMPUTERS, THROUGH 2016 (MILLION UNITS)
TABLE 24 GLOBAL MARKET PROJECTIONS FOR LAPTOP COMPUTER
HARD DRIVE DISK PROTECTION APPLICATIONS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 25 GLOBAL MARKET FOR MEMS ACCLEROMETERS IN HARD
DISK READ/WRITE HEAD TRACKING SYSTEMS, 2010-2016 (MILLION UNITS/MILLION $)
TABLE 26 GLOBAL MARKET PROJECTIONS FOR MEMS
ACCELEROMETERS IN CONSUMER PRODUCTS, THROUGH 2016 ($ MILLIONS)
TABLE 27 GLOBAL MARKET PROJECTIONS FOR MOBILE PHONE HANDSETS, THROUGH 2016 (MILLIONS OF HANDSETS)
TABLE 28 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN MOBILE PHONE HANDSETS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 29 GLOBAL MARKET PROJECTIONS FOR MEMS ACCELEROMETERS IN HANDHELD GAMING DEVICES, THROUGH 2016 (MILLION NITS/$ MILLIONS)
TABLE 30 PROJECTED GLOBAL DIGITAL CAMERA SALES, THROUGH 2016 (MILLION CAMERAS)
TABLE 31 GLOBAL MARKET PROJECTIONS FOR MEMS
ACCLEROMETERS IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 32 GLOBAL MARKET PROJECTIONS FOR MEMS ACCLEROMETERS IN “SMART” SPORTING GOODS, THROUGH 2016 (THOUSAND NITS/$ MILLIONS)
TABLE 33 GLOBAL MARKET PROJECTIONS FOR ACCELEROMETERS
USED IN OTHER NON-MILITARY APPLICATIONS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 34 MAJOR MEMS GYROSCOPE TECHNOLOGIES  TABLE 35 GYROSCOPIC MEMS APPLICATIONS
TABLE 36 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES, THROUGH 2016 ($ MILLIONS)
TABLE 37 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN AUTOMOTIVE APPLICATIONS, THROUGH 2016 ($ MILLIONS)
TABLE 38 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES
USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 39 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSOCPES
USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 40 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 41 GLOBAL MARKET PROJECTIONS FOR GYROSCOPIC MEMS IN CONSUMER PRODUCTS, THROUGH 2016 ($ MILLIONS)
TABLE 42 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES IN DIGITAL CAMERA IMAGE-STABILIZATION SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 43 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES
IN SEGWAY HUMAN TRANSPORTERS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 44 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES
USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 45 GLOBAL MARKET PROJECTIONS FOR MEMS GYROSCOPES
IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2016 (UNITS/$ MILLIONS)
TABLE 46 ESTABLISHED PRESSURE SENSING MEMS APPLICATIONS, 2010
TABLE 47 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2016 ($ MILLIONS)
TABLE 48 GLOBAL MARKET FOR ESTABLISHED AUTOMOTIVE MEMS PRESSURE SENSOR APPLICATIONS, THROUGH 2016 ($ MILLIONS)  TABLE 49 GLOBAL MARKET PROJECTIONS FOR MEMS MANIFOLD
ABSOLUTE PRESSURE SENSORS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 50 GLOBAL MARKET PROJECTIONS FOR MEMS TIRE PRESSURE MONITORING SYSTEMS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 51 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD
PRESSURE SENSORS, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 52 GLOBAL MARKET PROJECTIONS FOR MEMS PRESSURE SENSORS IN HOME APPIANCES, THROUGH 2016 (MILLION UNITS/$ MILLIONS)
TABLE 53 MEMS CHEMICAL AND GAS SENSOR APPLICATIONS
TABLE 54 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2016 ($ MILLIONS)
TABLE 55 GLOBAL MARKET PROJECTIONS FOR MEMS GAS SENSORS
USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2016 ($ MILLIONS)
TABLE 56 PROJECTED NUMBER OF CATALYTIC CONVERTEREQUIPPED VEHICLES PRODUCED WORLDWIDE, THROUGH 2016
(MILLION UNITS)
TABLE 57 PROJECTED GLOBAL SALES OF BLOOD GAS MONITORS, THROUGH 2016 (UNITS)
TABLE 58 GLOBAL MARKET PROJECTIONS FOR MEMS BLOOD GAS SENSORS, THROUGH 2016 (UNITS/$ MILLIONS)
TABLE 59 GLOBAL SALES OF AIR POLLUTION MONITORING EQUIPMENT, THROUGH 2016 ($ BILLIONS)
TABLE 60 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE/PERSONAL AIR QUALITY MONITORS, THROUGH 2016 (UNITS/$ MILLIONS)
TABLE 61 GLOBAL MARKET PROJECTIONS FOR MEMS USED IN PORTABLE CW AGENT DETECTORS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 62 GLOBAL MARKET PROJECTIONS FOR OTHER TYPES OF MEMS INDUSTRIAL CHEMICAL AND GAS SENSORS, THROUGH 2016 ($ MILLIONS)
TABLE 63 GLOBAL MARKET PROJECTIONS FOR OPTICAL MEMS IN INFRARED SENSORS BY APPLICATION SEGMENT, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 64 GLOBAL MILITARY/PUBLIC SAFETY MARKET FOR INFRARED MEMS SENSORS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 65 GLOBAL AUTOMOTIVE MARKET PROJECTIONS FOR INFRARED MEMS SENSORS, THROUGH 2016 (THOUSAND UNITS/$ MILLIONS)
TABLE 66 GLOBAL MARKET FOR INFRARED MEMS SENSORS IN OTHER APPLICATIONS, THROUGH 2016 ($ MILLIONS) 
TABLE 67 BIOCHIP APPLICATIONS
TABLE 68 GLOBAL BIOCHIP MARKET PROJECTIONS BY APPLICATION SEGMENT, THROUGH 2016 ($ MILLIONS)
TABLE 69 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN THE LIFE SCIENCES BY APPLICATION, THROUGH 2016 ($ MILLIONS)
TABLE 70 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2016 ($ MILLIONS)
TABLE 71 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS IN LOC DIAGNOSTIC DEVICES, THROUGH 2016 ($ MILLIONS)
TABLE 72 GLOBAL MARKET PROJECTIONS FOR MICROFLUIDIC
BIOCHIPS USED IN CBW SENSORS, THROUGH 2016 ($ MILLIONS)
TABLE 73 GLOBAL MARKET PROJECTIONS FOR BIOCHIPS USED IN
FOOD TESTING APPLICATIONS, THROUGH 2016 ($ MILLIONS)
TABLE 74 NANO-CHEMICAL SENSOR TECHNOLOGIES
TABLE 75 NANO-CHEMICAL SENSOR APPLICATIONS
TABLE 76 GLOBAL SALES PROJECTIONS OF NANOCHEMICAL
SENSORS BY APPLICATION SEGMENT, THROUGH 2016 ($ MILLIONS)
TABLE 77 NANO-BIOSENSOR TECHNOLOGIES
TABLE 78 NANO-BIOSENSOR APPLICATIONS
TABLE 79 PROJECTED GLOBAL SALES OF NANO-BIOSENSORS TO
THE LIFE SCIENCES MARKET, THROUGH 2016 ($ MILLIONS)
TABLE 80 GLOBAL MARKET PROJECTIONS FOR NANO-BIOSENSOR
POINT- OF-CARE MOLECULAR DIAGNOSTIC EQUIPMENT, THROUGH 2016 ($ MILLIONS)
TABLE 81 NANO-RADIATION SENSOR APPLICATIONS
TABLE 82 NANO-THERMAL SENSOR APPLICATIONS
TABLE 83 LARGEST U.S. MICROSENSOR HOLDERS (NUMBER OF PATENTS ISSUED BETWEEN 1/1/2005 AND 1/15/2011)

LIST OF FIGURES

SUMMARY FIGURE GLOBAL MICROSENSOR MARKET PROJECTIONS, 2010-2016 ($ MILLIONS)
FIGURE 1 PROJECTED GLOBAL MICRO MARKET TRENDS, 2010-2016 ($ MILLIONS)
FIGURE 2 PROJECTED TRENDS IN THE GLOBAL MICROSENSOR
MARKET BY END-USER SEGMENT, 2010-2016 (PERCENT OF TOTAL SALES)
FIGURE 3 GLOBAL MARKET SHARE PROJECTIONS FOR MICROSENSOR MATERIALS TECHNOLOGIES BY TYPE, 2010 AND 2016 (PERCENT OF TOTAL MEMS SHIPMENTS)
FIGURE 4 SACRIFICIAL LAYER ETCHING
FIGURE 5 LIGA PROCESS DIAGRAM
FIGURE 6 ISOTROPIC VS. ANISOTROPIC ETCHING
FIGURE 7 GLOBAL MEMS ACCLEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (PERCENT OF TOTAL SHIPMENTS)
FIGURE 8 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF AIRBAG MODULES, 2010-2016 (MILLION UNITS)
FIGURE 9 PROJECTED TRENDS IN GLOBAL SALES OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEMS, 2010-2016 (MILLION VEHICLES)
FIGURE 10 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF VEHICLE IN-DASH NAVIGATION SYSTEMS, 2010-2016 (MILLION SYSTEMS SHIPPED)
FIGURE 11 PROJECTED TRENDS IN GLOBAL SALES OF CARDIAC PACEMAKERS, 2010-2016 (THOUSAND UNITS)
FIGURE 12 PROJECTED TRENDS IN GLOBAL MILITARY/AEROSPACE MARKET FOR GPS SYSTEMS, 2010-2016 ($ MILLIONS)
FIGURE 13 PROJECTED GLOBAL TRENDS IN SALES OF HARD DRIVEEQUIPPED LAPTOP COMPUTERS, 2010-2016 (MILLION DEVICES)
FIGURE 14 PROJECTED TRENDS IN GLOBAL SALES OF MOBILE PHONE HANDSETS, 2010-2016 (MILLIONS OF HANDSETS)
FIGURE 15 PROJECTED GLOBAL UNIT SALES OF DIGITAL CAMERAS, 2010-2016 (MILLION UNITS)
FIGURE 16 GLOBAL MEMS ACCELEROMETER MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (% OF TOTAL SHIPMENTS)
FIGURE 17 PROJECTED TRENDS IN GLOBAL SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, 2010-2016 (MILLION UNITS)
FIGURE 18 PROJECTED GLOBAL SALES OF SEGWAY HUMAN TRANSPORTERS, 2010-2016 (UNITS)
FIGURE 19 PROJECTED TRENDS IN GLOBAL SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, 2019-2016 UNITS)
FIGURE 20 PROJECTED GLOBAL MEMS PRESSURE SENSOR MARKET SHARES BY APPLICATION SEGMENT, 2010-2016 (PERCENT OF TOTAL SHIPMENTS)
FIGURE 21 GLOBAL MEMS CHEMICAL AND GAS SENSOR MARKET
SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 ((PERCENT OF TOTAL SHIPMENTS)
FIGURE 22 PROJECTED GLOBAL PRODUCTION OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, 2010-2016 (MILLION VEHICLES)
FIGURE 23 PROJECTED TRENDS IN GLOBAL SALES OF BLOOD GAS MONITORS, 2010-2016 (UNITS)
FIGURE 24 PROJECTED GLOBAL AIR POLLUTION MONITORING AND SENSING EQUIPMENT MARKET TRENDS, 2010-2015 ($ BILLIONS)
FIGURE 25 GLOBAL MEMS IR SENSOR MARKET SHARE
PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (% OF TOTAL SHIPMENTS)
FIGURE 26 GLOBAL BIOCHIP MARKET SHARE PROJECTIONS BY APPLICATION SEGMENT, 2010-2016 (% OF TOTAL SHIPMENTS)
FIGURE 27 GLOBAL MARKET SHARE PROJECTIONS FOR IN VITRO MOLECULAR DIAGNOSTIC EQUIPMENT VS. CONSUMABLES, 2010 (%)
FIGURE 28 GLOBAL MICROSENSOR INDUSTRY CONCENTRATION, 2009 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS)
FIGURE 29 OVERALL GLOBAL MICROSENSOR MARKET SHARES BY COMPANY, 2009 (PERCENT OF TOTAL MICROSENSOR SHIPMENTS) .... 173
FIGURE 30 RECENT U.S. MICROSENSOR-RELATED PATENTS BY TYPE OF SENSOR (PERCENT OF PATENTS ISSUED SINCE JANUARY 1, 2005)
FIGURE 31 U.S. MICROSENSOR PATENTS BY NATIONALITY OF MICROSENSOR ASSIGNEE (PERCENT OF PATENTS ISSUED BETWEEN 1/1/2005 AND 1/15/2011)


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